High Resolution. High Speed. Wide Range.

3D white light interference microscopy for nano-level surface profile measurement

Opt-scope Rex

Introducing Opt-scope Rex

ACCRETECH’s Opt-scope series are white light interference microscopes that perform nano-level surface profile measurement using our proprietary high-speed, special-purpose algorithm DEAP. The latest addition to the series, Opt-scope Rex, not only offers high-accuracy measurement but also wider measurement range and significantly shorter measurement time.

Opt-scope Rex New Features

Key expansions in functionality


Uses white light interference for swift, non-contact measurement of surface roughness and profiles of machined mechanical parts, etc.

Six times faster scanning speed

Scan speed has increased six-fold. High-speed measurement at a high resolution of 0.01 nm is possible for a wider scope of applications, from narrow-range fine roughness to wide-range undulation shape analysis.

Max. electric XY stage travel range of 600mm

The XY stage travel range of the new model can be expanded up to 600 mm to suit various workpieces.

check_boxMax. workpiece height 102 mm
*Can be made to support greater height
check_boxMax. workpiece Loading capacity 30kg
*Can be made to support greater load
check_boxStage options, worktop customization are available
*Can accommodate size changes/screw hole processing, etc.
check_boxSupports variable XY stage size
*Portrait and landscape orientations possible
*Equipment external dimensions depend on stage size
check_boxPassive vibration isolation table
*Can also accommodate an active vibration isolation table
check_boxStores a PC and various axis control units
*May not be able to store all devices depending on unit configuration

Product Summary

Key specifications and features

Opt-scope Rex is equipped with ACCRETECH's proprietary technology DEAP (Algorithm for Detection of Envelope and Absolute Phase), which enables the calculation of envelopes at high-sensitivity over a wider measurement area. With DEAP's ability to reduce measurement noise, it is possible to measure slanted surfaces of machined mechanical parts that could not be measured well with conventional methods, thus enabling acquisition of clearer profile data.

White light interference method enables swift measurement

Opt-Scope Rex uses the principle of white light interference for the swift, non-contact measurement of surface roughness and profile of objects such as machined mechanical parts. There is no longer a need for the XY axial scanning operation required by contact probe-type CMMs, so measurement is overwhelmingly fast and can be completed in a short time.

Proprietary method for detecting white light interference fringe peaks with DEAP

DEAP (Algorithm for Detection of Envelope and Absolute Phase) is an original algorithm devised by Tokyo ACCRETECH. DEAP offers a wider scope of measurement than PSI (phase shifting interferometry) and is capable of calculating envelopes at high sensitivity with higher resolution and a wider scope of measurement than VSI (vertical scanning interferometry). DEAP's ability to reduce measurement noise enables overwhelmingly better effective resolution, allowing clearer profile data when measuring slanted surfaces of machined mechanical parts that were a challenge to measure with conventional methods.

Specifications & Features

The best choice for measuring roughness, defects, and fine contours of large workpieces

Maximum measurement height of 200 mm*. Adding a 130 mm column spacer (option) increases height to 330 mm. It offers sufficient measurement height even for large workpieces with jigs attached for securing the workpiece. It also accommodates a wide range of applications, from the analysis of 3D roughness, scratches, and wear of sliding surfaces such as bearings, profile evaluation of grinding wheels and carbide blades, to the detection of surface defects in semiconductor wafers. (in the case of Opt-scope S+)

Improved measurement efficiency with auto focus and auto range functions
A high-speed camera option also significantly reduces scanning time

Opt-scope offers two outstanding features that enhance efficiency from pre-measurement preparation to measurement completion.

●Auto focus function: A function that scans the target axis in an upward direction, automatically detecting interference fringe and adjusting focus. This significantly reduces the time required for focusing before measurement. In addition, users can choose either high-speed mode or high-sensitivity mode depending on the workpiece.

●Auto range function: A function that can automatically optimize the measurement range in the Z direction, which was previously set uniformly, for each individual measurement point when measuring multiple points of a workpiece. This minimizes measurement time per point and significantly shortens the total measurement time, greatly increasing the efficiency of stitching measurement and the continuous measurement of wide areas.

NEWhigh-speed camera option
Six times faster scanning speed*

2 modes to choose from depending on accuracy needs
High-speed mode is now even faster *When used at recommended pixel counts.

Transparent multilayer film measurement function

This function can handle up to six transparent layers (seven interfaces) of film 1.5 µm or more in optical length and analyze the surface texture of the topmost surface, the film thickness of each layer, and film thickness distribution.

Opt-scope Rex - EYE

The Developers' Perspectives

Opt-scope Rex is a large model 3D white light interference microscope that performs high-speed nano-level surface profile measurement utilizing "DEAP2," ACCRETECH's original high-speed, special-purpose detection algorithm. We spoke with two ACCRETECH engineers in charge of product development who maintain that "measuring instruments should evolve with customer input" about their thoughts on the product.

Tetsuji Kawagami

OPT Team Leader Coordinate Measuring Group, Engineering Division
Metrology Company

Yoshinori Nekozaki

Supervisor Coordinate Measuring Group, Engineering Division
Metrology Company

Kim Jae-Gyoung

Managing Director, Measurement Division

ーPlease tell us about Opt-scope's features.

Kawagami:Opt-scope takes the place of conventional contact-type measuring instruments as a 3D surface roughness/contour measuring instrument capable of non-contact measurement. It enables tricky measurements, such as of minute workpieces that the stylus cannot pinpoint easily, soft workpieces, and hard workpieces which would otherwise damage the stylus.
With the conventional contact-type measuring instrument, the needle-like stylus would sometimes scratch mirror-finish products when performing tracing. Also, in order to evaluate roughness by surface rather than by line, surface data had to be prepared based on an immense volume of line data, which required the time-consuming process of repeating tracing over and over while slightly adjusting the measurement location. The Opt-scope series solves this issue of poor efficiency by obtaining data by surface rather than by line to significantly shorten measurement times. Since Opt-scope is a microscope type with adjustable lens magnification, users can make adjustments such as zooming in on measurement surfaces, performing wide-view verification, and switching resolutions required for analysis.

ーWhat has Opt-scope made possible?

Kawagami:Opt-scope has helped to dramatically improve quality control accuracy through 3D visualization of surface data. For example, in the case of products where scratches on a mirror surface is unacceptable, Opt-scope checks the location of scratches using 2D images, converts this to 3D data, then numerically evaluates the depth, width, and length of unacceptable scratches. Opt-scope can obtain data of the scratched areas and mirror surface area as part of a single surface, allowing a grasp of the overall problem and an accurate evaluation. With contact-type however, the problem would go unnoticed unless the instrument happened to trace the line along the scratch.

ーI understand that the performance of Opt-scope Rex is significantly higher than the conventional model.

Nekozaki:The stage now has a drive range of 400 to 600 mm instead of 25 to 50 mm, and allows a maximum workpiece weight of 30 kg. Opt-scope Rex supports measurement of a variety of workpieces, from minute precision parts to heavy workpieces such as molds.

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Please tell us about the background of the development of Opt-scope Rex.
ーWhat specific measurement problems did the customer inform you of?

A user proposed that the measurement error increased due to the diameter and wear of the measuring stylus tip in the contact type roughness measuring instrument they currently use. ACCRETECH KOREA made a request to the Technical Department to improve Opt-scope R in order to alleviate this customer's concern and set the improvement of non-contact measuring instrument specifications as the most important issue. Considering the need to make a planar evaluation of surface roughness or even 3D profile evaluation of embossed surfaces, we explained the usefulness of Opt-scope R to the customer and was able to gain their understanding regarding technological improvement.

ーWhat kind of request did you make to ACCRETECH JAPAN's development team to solve the customer's problems?

I made two requests to our colleagues in Japan.
First, due to the nature of the customer's workpiece, we needed a bigger stage than the current one. We requested that the movement range of the conventional electric XY stage included with the Opt-scope R200 be extended from 200 mm to 400 mm.
The second was expansion of the stitching function. Stitching function is a wide-range evaluation method whereby the stage automatically moves across and measures a specified range then connects multiple images, and we asked the Technical Department to expand this connection range.

ーHow did you feel when you received a proposal from the development team?

We received a proposal from the technical department for Opt-scope Rex as an enhanced model of Opt-scope R. Our biggest concern was the expansion of the electric XY stage movement range, and the proposal from the Technical Department made this possible, as well as offered expanded stitching range. When we received the proposal, we felt elated to be able to offer an optimal solution to the customer's problem, and at the same time, we started to anticipate that the demand will increase in Korea as this model strengthens ACCRETECH's product competitiveness.

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Toward Even Better Monozukuri with Measurement as the First Step

Opt-scope Rex enables a wider range of high-accuracy measurements in less time. ACCRETECH will continue to support customers with its products to achieve an even higher level of monozukuri through measurement.

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