Semiconductor Manufacturing Equipment
UF200R/UF190R
Φ200mm
Discrete Device
Power Device
Logic Device
MEMS
High-speed probing machine for discrete devices supporting 200mm wafers

UF200R/UF190R

High-speed probing machine for discrete devices

Feature

It performs transfer and testing on 5 to 8 inch wafer.  (UF200R)
It performs transfer and testing on 4 to 8 inch wafer. (UF190R)
Adapts MMI, which is the same as UF2000

Variety of options enables all kinds of wafer tests that are not standard in this industry.

Option

Testing environment to adopt from low to high temperature (UF190R is available only for high temperature)

Testing environment for 4-inch wafer (UF200R)

Hinge-type manipulator for test head (UF200R)

Special transfer mechanism for warpage and ultra-thin wafers

MEMS transfer by dedicated mechanism

Micro current testing environment

High voltage testing environment 

Wide-variety of network environment

High-speed needle mark inspecting function