Semiconductor Manufacturing Equipment
HRG300
Φ450mm
High Rigid 1-Axis Grinder

HRG300

Supports a variety of applications from single-wafer grinding of up to Φ450 mm to batch grinding of small-diameter workpieces attached to the support base

Feature

The structure with the little mechanical transformation against the workload of grinding is realized by placing the processing position on the center positon of the slide guides placed in a triangle form and the infeed shaft on the processing position

Due to the high-rigidity, it enables the processing with shorter amount of time while reducing the grinding damage

Due to the high-rigidity, it enables the processing of the appropriate self-sharpening.  It prolongs the life of the grindstone

It is equipped with the in-process gauge that is batch processing-compliant, and performs the processing while measuring the wafer thickness in the batch processing

It detects the clogging of the grindstone and performs the dressing as necessary