World No.1 Class of Highest Accuracy, Highest Speed and Highest Resolution

Flagship model for SURFCOM to attain the ultimate perfection level with brand-new linear motor drive as the main machine


Highly Stable Optical Path Laser Interferometer

Sensor Structure
  • This measuring machine adopts an optical fiber-based laser interferometer, one of Tokyo Seimitsu's constituent technologies, and incorporates a newly developed highly stable optical path laser interferometer having a resolution of 0.31 nm.
  • This system features a dynamic range as well as a resolution ratio of 42,000,000:1.This means that in a single trace you can evaluate contour profiles in wide ranges and also hidden fine surfaces.

Linear Motor Drive (Patented)

  • Linear motor drive ensures high accuracy and high-speed movement.
  • Also, low vibration ensures more stable measurement at high magnifications.

Roughness and Contour Analyzed in a Single Measurement

Measurement efficiency imporved and high accuracy is maintained at the same time.

Wide Range

  • Wide measuring range of 200 mm (horizontal direction) and 13 mm (vertical direction)
  • Motorized tilting unit capable of tilting to 45° also available. (SURFCOM CREST-T)

About Precision Measuring Instrument

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