ZEISS XENOS®
Flagship model that makes a new history, surpassing by far the previous actual accuracy by integration of innovative technologies
The New reference
XENOS----a naming associated with the highest peak. This coordinate measuring machine, that is just right for that name, is stepping into new territory, far surpassing the precision and measurement efficiency until now due to the innovative technology. ZEISS XENOS is the world’s best in class reference device that achieves extremely high measurement precision of 0.3 μm or less.
Innovative silicon-carbide ceramic used for key body components
In developing ZEISS XENOS®, the material was studied from the stage of manufacturing and silicon carbide ceramic of the size that had previously been impossible to manufacture was successfully put to practical use. Thus, major structural components of ZEISS XENOS® are made of silicon carbide ceramic. Compared to the aluminum ceramic, this silicon-carbide ceramic exhibits lower expansion (0.5 times thermal expansion), higher rigidity (1.3 times rigidity) and less weight (0.8 times mass) and serves as an indispensable
factor in realizing higher accuracy.
Virtual central drive
Unlike typical coordinate measuring machines, ZEISS XENOS® has a linear drive structure for all axes. This structure is an unique feature of ZEISS XENOS® as very few measuring machines with linear drives have so far been applied. In addition to the existing central drive concept, the newly developed Y-axis dual drive structure (virtual central drive) has accomplished extremely high repeatability throughout the measuring range by optimizing the drive control on right and left ends according to the center of gravity change caused by X-axis movement. Precision positioning technology that has been nurtured by ZEISS for 30 years and state-of-the-art control algorithm to optimally distribute the thrust of left and right drive systems have realized the virtual central drive, a technology patented by ZEISS.
Commitment to accuracy
Generally, scales of coordinate measuring machines require temperature correction to reduce errors caused by thermal expansion. In developing ZEISS XENOS®, Zerodur® scale, whose thermal expansion is almost zero, was designed to achieve higher resolution exclusively for ZEISS XENOS®, and the surface tension floating method, which is a patented technology, was applied to attach the scale to avoid the influence of the bimetallic effect. This eliminates the uncertainty of temperature correction.
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