ZEISS MICURA
High Accuracy
Active Scanning
Bridge

ZEISS MICURA

Compact yet high performance
High-accuracy model that specializes in contact measurement and can evaluate small precision parts that have tight tolerances with extremely high accuracy

Features

High accuracy measurement even for small workpieces

High accuracy measurement even for small workpieces

ZEISS MICURA is a high-accuracy coordinate measuring machine dedicated to contact measurement of small parts. It has a compact body equipped with various mechanisms and technologies to improve accuracy, thus achieving a guaranteed accuracy of E0, MPE = 0.7+L/400 μm. A stylus with a minimum ball diameter of φ 0.3 mm can be used to allow for
high precision measurement of details (when equipped with the VAST XT gold sensor).

Equipped with active scanning sensor VAST XT gold as a standard feature
VAST XT gold, a tactile sensor enabling "active scanning" which is able to keep the measuring force constant and control the measuring force direction to be normal to the work surface

Axis scales, which are the key to accuracy, are made of a material with extremely small expansion and contraction due to heat
Zerodur®, a material with anextremely low thermal expansion coefficient, is used for the scale to minimize the impact of changes in the environmental temperature on the accuracy.

Unique floating method for scale retention
   The scale of each axis is attached in an original method, i. e., fixing one end on the guide and leaving the other end free, so that it is free from the impact of guide expansion and contraction caused by temperature changes.

Air bearings support theguides in four directions

Torsion of the measuring machine in operationis suppressed by supporting the guide of each axis by air bearings in four directions: up, down, right and left.

Active damping system preventing the impact of vibration on accuracy

Pneumatic active damping system incorporated as a standard feature keeps the measuring machine horizontal and reduces vibration transmission from the floor,

ZEISS VAST technology combined with a rotary table for higher efficiency

ZEISS VAST technology combined with a rotary table for higher efficiency

"VAST Navigator" is mounted for real-time correction of the stylus and measuring machine deformation caused by the force that changes in measuring operation (accelerations). This superior technology can significantly enhance the accuracy in highspeed scanning measurement and enables speedy and reliable measurement. In addition, the new ZEISS MICURA offers various options for even greater measuring efficiency such as the rotary table.

"VAST Performance" FlyScan function and QuickChange function(optional)
   FlyScan function allows scanning measurement of a notched surface as if it were a continuous surface, and QuickChange function allows stylus changes to be performed at the maximum speed of the measuring machine

Rotary table(optional)
 This option enables 4 axes scanning measurement that synchronizes the 3 axes of the measuring machine with the rotation axis of the rotary table, and is highly beneficial in that it achieves high-accuracy measurement of intricate shapes and reduces stylus cost as well as measurement time by reduction of stylus change frequency

Reducing running costs with two ecological and economical functions

Two functions that can reduce excess air and power consumption contribute to running cost reduction in measuring machine operation.

Air-supply idling stop "ZEISS AirSaver"
This function automatically stops the compressed air supply when the machine is in standby mode, similar to the idling stop function of a vehicle

Automatic On/Off Power new function "ZEISS PowerSaver"
By setting a specific time of the day and/or week in advance, the power of the measuring machine can be automatically turned on and off