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Wafer Probing Machines

Wafer probing machines perform electrical tests of each chip on a wafer, ensuring the quality of semiconductor devices.

Wafer Probing Machines: UF3000EX

Next-generation high-spec probing machine the world No.1 supplier presents

Phenomenal levels of throughput have been made possible with the synergistic effects of high-speed wafer handling enabled by a new algorithm, and the high-speed and low-noise XY Stage enabled by a newly developed purpose-built drive unit for probes. The Z axis ensures world-class load capacity and high precision, and offers excellent contact via an optimal structural design that employs topology which reliably eliminates changes in flatness due to positioning.

With advanced OTS latest positioning system technology and by colorizing wafer alignment imaging and equipping a light super magnification function, the UF3000EX has improved dramatically in terms of precision and operability.

Wafer Probing Machines: UF3000

Assimilating the up-to-date technologies such as originative OTS, QPU and TTG, this super high-spec system provides the testing system which meets your needs for the miniaturization of the next-generation devices and various testing environment.

Feature 1OTS - the newest positioning technology (Optical Target Scope)

OTS - the newest positioning technology

OTS enables to measure the relative position of the cameras with absolute accuracy, which improved dramatically.
Based on the ACCRETECH metrology technology, OTS enables the self-correlation of the alignment optical system.

Feature 2QPU - super high-rigid chucking (Quad-Pod Unit)

To effectively attain the accuracy in positioning, the high rigidity of every part is greatly important.
The UF3000 uses the new technology of 4 axes driving mechanism (QPU) for Z-axis, enabling the high-rigid, stable probe contact.

QPU - super high-rigid chucking (Quad-Pod Unit)

Feature 3Load-port

Testing environment satisfying the users' needs is available by the common platform of 8-inch and 12-inch cassettes and the front allocation of the inspection tray. The machine is also ready for AMHS (Automated Material Handling System).

Load-port

Load-port

Feature 4TTG (Touch To Go)

Pursuing the easy operation, the UF3000 adopts the function to move to the position you touch on the map or image shown on the touch panel. Setting up is easy, and screen configuration is possible by the user definition.

TTG

TTG

Wafer Probing Machine: UF2000

Tokyo Seimitsu, now known as Accretech, has continued to lead the semiconductor industry as the world's number one manufacturer of wafer probing machines. The newly developed UF2000 high-precision 200mm wafer prober is designed for devices with decreasing pad pitches typified by LCD drivers and other such devices, and features enhanced functionality in all areas, while offering the same functions and operating ease as the previous model.

Feature 1

Achieves overall precision of ±1.5µm.

Feature 2

Adopts new processor, newly designed loader and image processing system with enhanced performance, dramatically boosting throughput.

Wafer Probing Machine: UF200A

Evolving and Proliferating Wafer Probing Machine, UF Series Based on a flexible platform, the high accuracy and high rigidity, UF series is further evolved. Wafers are varying with the progress of line width shrinkage and assembly technology. This machine can be used for processing very thin wafers and can be used as a handler for the wafer level burn-in system.

Feature 1

8-inch multipurpose machine.

Wafer Probing Machine: UF190B

Evolving and Proliferating Wafer Probing Machine, UF Series Based on a flexible platform, the high accuracy and high rigidity, UF series is further evolved. Wafers are varying with the progress of line width shrinkage and assembly technology. This machine can be used for processing very thin wafers and can be used as a handler for the wafer level burn-in system.

Feature 1

High-performance, high-throughput, and excellent cost performance machine.

Feature 2

The UF190A features the same high-performance and excellent operability as the UF200 earned a reputation including the automatic needle alignment function and the color LCD touch panel.

Wafer Probing Machine: FP200A

Evolving and Proliferating Wafer Probing Machine, UF Series Based on a flexible platform, the high accuracy and high rigidity, UF series is further evolved. Wafers are varying with the progress of line width shrinkage and assembly technology. This machine can be used for processing very thin wafers and can be used as a handler for the wafer level burn-in system.

Feature 1

Frame transfer ready for the thinner wafer.

Frame transfer ready for the thinner wafer.

Wafer Probing Machines Network: VEGANET

The operation status of the wafer probing machines can be centralizedly monitored to further improve the operation rate

VEGANET
System monitor

VEGANET
Operation rate control

VEGANET
Prober status monitor

VEGANET
Data analysis

Wafer Probing Machines Network: LIGHTVEGA

The resource control will be centralized on the user host

Wafer Probing Machines Network: GEM Network System

Wafer Probing Machines Network: VEGA PLANET

Dedicated terminals contributing to the efficiency enhancement of test areas

Feature 1

Device data compile terminal

Feature 2

Remote operation terminal

Feature 3

Logging data analysis terminal

Feature 4

Map viewer