Wafer Dicing Machines:A-WD-10B
This multipurpose dicing machine realizes ease of use with the adaptation of the much sought-after space saving factor, slide cover system and function
management system.
Feature
- The Z-axis drive unit encoder system stepping motor guarantees high accuracy and reliability, and the X- and Y- axis slide section has a high accuracy, high rigidity linear guide.
- Simultaneous 2-axis control of X- and Y-axis and high throughput, with a max. speed of X-axis: 450mm/s, Y-axis: 80mm/s and Z- axis: 40 mm/s.
- A conveniently-located compact operating panel, rubber switch and jog dial optimized to the operation type (one hand operation) are used; an LCD panel is also used.
Common usages
- Electronic parts (SMD, HIC, Piezo device, etc)
- Semiconductors (Si, GaAs, etc)
- Glass (crystal, filter, small LCD, etc)
- Thermal Head (Small), New Materials
The clarity of the microscope image and the accuracy of image recognition are improved by LED lighting.
(Ring lighting specification: Optional)
User-friendly Operating Panel
Operation Display
Function Management System
Registering frequently used functions and creating shortcuts improves operability.
Specifications
A-WD-10B Specifications
| Work Size | 162 × 162 mm | |
|---|---|---|
| X axis | Movement stroke | 290 mm |
| Cutting speed | 0.1 - 450 mm/s | |
| Y axis | Movement stroke | 162 mm |
| Maximum speed | 80 mm/s | |
| Positioning accuracy | 5 µm | |
| Z axis | Movement stroke | 35 mm |
| speed | 40 mm/s | |
| Resolution | 0.0001 mm | |
| θ axis | Rotation range | 290° |
| Positioning resolution | 0.00018°(0.648") | |
| Alignment | Microscope type | Split-field type |
| Camera, LCD | Standard (12.1" magnification 211 ×) | |
| Spindle | Type | Air spindle with a built-in high-frequency AC motor |
| Maximum revs. | 40,000 min-1 | |
| Maximum output | 900W | |
| Others | Power supply | 200/220V AC , 3 phase |
| Power consumption | 2kVA | |
| Air supply | Air supply 0.55 - 0.6 MPa, 180ℓ/min | |
| Spindle coolant water | 0.2 - 0.5 MPa, 1.5ℓ/min | |
| Cutting water | 0.2 - 0.5 MPa, 5ℓ/min max | |
| Equipment dimensions, weight | 650 W × 890 D × 1,300 H mm, 500 kg | |
Main Options
A-CS-100A (Optional)
- Non-contact optical cutter setting unit
- Blade breakage detector
- 3” flange compatibility
- Y-scale positioning accuracy:2 µm/162 mm
- Cover interlock
- Ring lighting
- Middle power spindle
- 3 color indication lamp
- Mist fan
- CE marking
- A-CS-100A (Spin Cleaner/Dryer)
