Semiconductor Manufacturing Equipment
VEGA PLANET
Network
FTP
PC Tools
Data Editing and Storage
Remote Operation
Dedicated terminals based on VEGA PLANET for highly efficient test area

VEGA PLANET

This is a group of dedicated terminals for increasing the efficiency of test areas.

Feature

Feature

VEGA PLANET is a tool to perform various work, which has been done at the machines, on computers.

Various preparation and operation check work done at the machines can be transferred from the clean room to the office. This would improve the productivity of operators and allow machines to be used exclusively to conduct measurement, to which they are originally intended, thus increasing the operation rate of expensive testers and probers. This tool also controls the movement of operators to and from the clean room, ensuring a dust-free environment in the room.

Tool

VEGA PLANET provides tools for:

Creating and editing device data (device commander)

Creating and editing parameters
Creating and editing parameters
Creating and editing parameters

Monitoring operation status and remote tool (remote monitor tool)

Understanding the operation status of machines
Understanding the operation status of machines
Displaying the prober screen
Displaying the prober screen

Viewing and editing map files (map editor)

Listing the wafer IDs and set data
Listing the wafer IDs and set data
Listing the wafer IDs and set data

Analyzing logs (log analysis tool)

Displaying analysis
Displaying analysis
Searching screens
Searching screens