Semiconductor Manufacturing Equipment
FP3000
Φ300mm
Frame
Diced Wafer
MEMS
Probing machine for 300 mm framed wafers

FP3000W

High precision model for the 300 mm wafers
Supporting CSP/WLP/PLP devices that is affixed on dicing frames.

Feature

It performs the precision measurement using our unique correction technology on cut wafer, package and such that are attached to the dicing frame.
It is the multi-functional prober which performs transfer and testing on a frame as well as wafer with only one click of button by optional function.

Optimization of correction value is realized by the application which is the outcome of the well-accumulated experiences of 15 years since the release of the frame transfer prober.

Option

8/12 inch wafer transfer dual mechanism

8 inch frame transfer mechanism

Multiple barcode management

FFU to realize clean testing environment

Hinge-type manipulator for test-head

High-temperature testing environment

Ultra-high magnification color optical system

Needle track inspecting function

PLP testing for diced 300mm square

PLP testing for up to 330mm square