SURFCOM 1400G-LCD
This is a surface texture measuring instrument suitable for evaluating the waviness, surface roughness, and level difference of thin workpieces with a large surface area such as glass substrates, static electric chucks, or wafers.
Features
This surface texture measuring instrument boasts a track record of numerous uses with glass substrate measurements and static electric chuck measurement
The SURFCOM 1400G-LCD can measure thin workpieces with a large surface area over a broad range. Unlike general surface texture measuring instruments in which the pickup side moves in the X-axis direction, the table side (portable workpiece tracing driver) on which the workpiece is loaded moves in the X-axis direction for measurement. It supports both a broad drive range of over 300 mm and a high X-axis straightness precision, and it provides highly reliable measurement results for the waviness, surface roughness, level difference, and so on of the workpiece. In addition, since the pick-up retention section can be moved in the Y-axis direction, a variety of locations on the workpiece are easy-to-approach, and it is possible to evaluate the waviness and the roughness along several lines.
Measuring range 300 mm × 250 mm type
X-axis: 300 mm, Y-axis: 250 mm
Measuring range 500 mm × 500 mm type
X-axis 500 mm, Y-axis: 500 mm
Measuring range 650 mm × 650 mm type
X-axis: 650 mm, Y-axis: 650 mm
Customizable to match various needs
We offer a variety of customizations, including a loading plate that matches the workpiece, a Y-axis motorized drive, a measurement position confirmation unit for accurately measuring fine details such as electrostatic chuck embossing, and an auto-retry function that automatically re-measures until the diameter of the embossing is measured while fine-tuning the measurement line in the Y-axis direction.
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