Tokyo Seimitsu Co., Ltd. (Chairman & CEO: Hideo Ohtsubo) has begun selling the SURFCOM 5000DX, a surface roughness/profile measuring instrument capable of simultaneously measuring surface roughness and profile thanks to the adoption of a newly developed sensor.

The SURFCOM 5000DX surface roughness/profile measuring instrument incorporates unique technology to satisfy the conflicting demands of high speed, high precision and minimum vibration. It provides higher speed and lower vibration with an acclaimed linear motor drive, making it the instrument with the number one performance in the world when combined with the high precision achieved with the newly developed high-resolution sensor. Both surface roughness and profile can be evaluated and analyzed in a single measurement. This reduces the time required for setup, furthermore, boosts throughput by speeding up measuring unit as 200mm/s.

Features of SURFCOM 5000DX

1. Linear motor drive enables measurements at high speed with minimum vibration.
2. Newly developed cylindrical sensor facilitates measurement of the inner diameter of workpieces.
3. Cover to prevent any influence from air currents provided as standard feature to achieve high precision.
4. Maximum column drive speed of 200 mm/sec.
5. Dedicated vibration isolation platform (DX) system minimizes floor space requirements.
6. Standard system layout can accommodate measurement of large workpieces and inner diameter.
7. New sensor developed using proven highly stable double optical path He-Ne laser interferometer achieves dynamic range/resolution ratio of 41,935,484 : 1.

Main Specifications (SURCOM 5000DX)

• Measuring range
  • X Axis (Lateral direction): 200mm
  • Z Axis (Vertical direction): 13mm
• Indicated Accuracy
  • X Axis (Lateral direction): ± (0.2+L/1000) µm
  • Z Axis (Vertical direction): ± (0.2+?H?/1000) µm
• Resolution
  • X Axis (Lateral direction): 0.5nm
  • Z Axis (Vertical direction): 0.31nm (standard stylus)
• Straightness Accuracy
  • 0.05 + 3L/10000 µm L = Measuring length (mm)
• Measuring Speed
  • 0.03 - 3 mm/s (roughness)
  • 0.03 - 20 mm/s (profile measurement)
• Movement Speed
  • Max. 200 mm/s (Drive unit)