Tokyo Seimitsu to introduce the A-FP-210A, a CMP system supporting volume-production systems
Tokyo Seimitsu Co., Ltd. (Chairman & CEO: Hideo Ohtsubo) has developed an A-FP210A volume-production-typed CMP system to be unveiled and exhibited at the upcoming SEMICON Japan 2000 tradeshow.
Based on analysis of user evaluations on the A-FP-210 beta machine, Tokyo Seimitsu has improved the beta to create the volume-typed A-FP-210A, whose full-scale introduction will follow after the SEMICON Japan tradeshow.
Featuring an air float-typed carrier created with air control technology and a proprietary real-time endpoint detection mechanism, the A-FP-210A is an innovative instrument that can be used for a variety of applications, including Cu and STI processes. CMP processes are becoming more and more important with increasing device micronization. In fact, the global market for CMP systems is expected to grow by over 30% per year to reach 200 billion yen in 2001. Furthermore, in the current atmosphere of industry-wide reorganization and oligopoly among market players, Tokyo Seimitsu seeks to drastically boost its market share by introduction of the A-FP-210A, an instrument that delivers the throughputs necessary for volume production lines and that features significantly enhanced surface uniformity performance and dishing/ erosion properties, the two most critical attributes for CMP systems.
- Price: 200 million - 250 million yen (cleaning module included)
- Sales target in the first year (2001): 100 units
- Key features and performance
A) Enhanced surface uniformity performance
Using an air float-typed carrier, the A-FP-210A stably delivers enhanced surface uniformity of less than 2%(1sigma) in Cu processes. It also features a wide process window for each process while reducing dependence on slurries and pads, delivering equivalent performance in various other applications.
B) Real-time endpoint detection mechanism
Tokyo Seimitsu’s unique detection mechanism and analysis software ensure endpoint detections by monitoring residue screen in real-time, without creating dependence on slurries.
