Feature

Feature 1

High-precision measuring heads with resolution as high as a reading of 0.01 µm.

Feature 2

Even when temperature changes by 10｡C, changes in measured values are 0.5 µm or less. This proves that they are resistant to temperature changes.

Feature 3

There are no drifts in measured values. This eliminates the need for dimensional correction even at power on.

Feature 4

Optimum as in-process gauges for high-precision parts machining tools.

Feature 5

Also suitable as post-process gauges such as ranking parts that have a small width of tolerances (e.g., selecting them in 0.5 µm ).